Publications by Research Area
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"Physics of High Power Impulse Magnetron Sputtering." ISSP2007: The 9th International Symposium on Sputtering & Plasma Processes. 2007. LBNL-62147..
"Spatial distribution of average charge state and deposition rate in high power impulse magnetron sputtering of copper." Journal of Physics D 41 (2008) 135210-1-6. LBNL-679E..