Cleanroom Energy Efficiency: Metrics and Benchmarking

Publication Type

Journal Article

Date Published

10/2010

LBNL Report Number

LBNL-4848E

Abstract

Cleanrooms are among the most energy-intensive types of facilities. This is primarily due to the cleanliness requirements that result in high airflow rates and system static pressures, as well as process requirements that result in high cooling loads. Various studies have shown that there is a wide range of cleanroom energy efficiencies and that facility managers may not be aware of how energy efficient their cleanroom facility can be relative to other cleanroom facilities with the same cleanliness requirements. Metrics and benchmarks are an effective way to compare one facility to another and to track the performance of a given facility over time.

Journal

ASHRAE Journal

Volume

52

Year of Publication

2010