LBNL Report Number
Cleanrooms are among the most energy-intensive types of facilities. This is primarily due to the cleanliness requirements that result in high airflow rates and system static pressures, as well as process requirements that result in high cooling loads. Various studies have shown that there is a wide range of cleanroom energy efficiencies and that facility managers may not be aware of how energy efficient their cleanroom facility can be relative to other cleanroom facilities with the same cleanliness requirements. Metrics and benchmarks are an effective way to compare one facility to another and to track the performance of a given facility over time.