Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents

Publication Type

Journal Article

Date Published

10/2014

Abstract

Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no exception. While most recent studies focused on traveling ionization zones in high power impulse magnetron sputtering, we show here fast camera images of magnetron discharges at very low current. A single drifting ionization zone is always present, even down to the threshold current of about 10 mA.

Journal

IEEE Transactions on Plasma Science

Volume

42

Year of Publication

2014

Short Title

IEEE Trans. Plasma Sci.

Issue

10

Pagination

2578 - 2579

ISSN

0093-3813