Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering

Publication Type

Journal Article

Date Published

10/2013

Abstract

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E × B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.

Journal

Applied Physics Letters

Volume

103

Year of Publication

2013

Short Title

Appl. Phys. Lett.

Pagination

144103

Issue

14

ISSN

00036951