Efficient Airflow Design for Cleanrooms Improves Business Bottom Lines

Publication Type

Conference Paper

Date Published



LBNL Report Number



Based on a review of airflow design factors and in-situ energy measurements in ISO Cleanliness Class-5 cleanrooms, this paper addresses the importance of energy efficiency in airflow design and opportunities of cost savings in cleanroom practices. The paper discusses design factors that can long lastingly affect cleanroom system performance, and demonstrates benefits of energy efficient cleanroom design from viewpoints of environmental control and business operations. The paper suggests that a high performance cleanroom should not only be effective in contamination control, but also be efficient in energy and environmental performance. The paper also suggests that energy efficient design practice stands to bring in immediate capital cost savings and operation cost savings, and should be regarded by management as a strategy to improve business bottom lines.

Conference Name


Year of Publication


Conference Location

Phoenix, AZ

Call Number