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By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination control.