Evaluation of the Plasma Distribution of a Quasi-Linear Constricted Plasma Source

Publication Type

Journal Article

Date Published

02/1999

LBNL Report Number

LBNL-42016

Abstract

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.

Journal

IEEE Transactions on Plasma Science

Volume

27

Year of Publication

1999
82

Issue

1

Pagination

82-83