Observation of Self-Sputtering in Energetic Condensation of Metal Ions

Publication Type

Journal Article

Authors

LBNL Report Number

LBNL-55876

Abstract

The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached - 50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum arc ions into account.

Journal

Applied Physics Letters

Volume

85

Year of Publication

2004

Pagination

6137-6139

Call Number

LBNL-55876