Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

Publication Type

Journal Article

Date Published

08/2008

LBNL Report Number

LBNL-680E

Abstract

Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.

Journal

Applied Physics Letters

Volume

93

Year of Publication

2008

Issue

7

Pagination

71504