LBNL Report Number
In order to identify and pursue energy efficiency opportunities associated with cleanrooms, it is necessary to understand the design and operation of cleanroom systems for specific contamination control requirements. With the industrial trend toward more stringent cleanliness class and tightening clean spaces, it is vital to understand the design of minienvironment and the operational performance of its systems. A good understanding of such system performance would help to identify opportunities in efficient energy end-use and wise allocation of resources associated with processes or productions that require minienvironments and cleanrooms. This report summarizes a case study on energy performance of a common minienvironment used in semiconductor industry, and discusses the opportunities in saving energy, in particular, the opportunities in achieving efficient operation and design that entails applications of minienvironments.