Optical Constants of Sputter-Deposited Ti-Ce Oxide and Zr-Ce Oxide Films

Publication Type

Journal Article

Date Published

09/1998

LBNL Report Number

LBNL-42059

Abstract

Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects.

Journal

Applied Optics

Volume

37

Year of Publication

1998
5993

Issue

25

Pagination

5993-6001