Performance Evaluation of Cleanroom Environmental Systems

Publication Type

Journal Article

Authors

LBNL Report Number

LBNL-53282

Abstract

This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance.

Journal

Journal of the Illuminating Engineering Society

Volume

46

Year of Publication

2003

Pagination

66-73

Call Number

LBNL-53282