A Plasma Lens for Magnetron Sputtering

Publication Type

Journal Article

Date Published

11/2011

Abstract

A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.

Journal

IEEE Transactions on Plasma Science

Volume

39

Year of Publication

2011

Short Title

IEEE Trans. Plasma Sci.

Issue

11

Pagination

2528 - 2529

ISSN

0093-3813