Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

Publication Type

Journal Article

Date Published

07/2013

Abstract

Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side-on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation.

Journal

Applied Physics Letters

Volume

103

Year of Publication

2013

Short Title

Appl. Phys. Lett.

Pagination

054104

Issue

5

ISSN

00036951